Glass Imprint Templates by Spark Assisted Chemical Engraving for Microfabrication by Hot Embossing
نویسندگان
چکیده
منابع مشابه
Hot embossing of micro-lens array on bulk metallic glass
Hot embossing of micro-lens array on bulk metallic glass C.T. Pan a,∗, T.T. Wu a, M.F. Chen a, Y.C. Chang b, C.J. Lee b, J.C. Huang b a Department of Mechanical and Electro-Mechanical Engineering, and Center for Nanoscience & Nanotechnology, National Sun Yat-Sen University, Kaoshiung 804, Taiwan, ROC b Institute of Materials Science & Engineering, Center for Nanoscience and Nanotechnology, Nati...
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We developed a fabrication technique of anti-reflective structures for applications in the visible spectral range. The depth and duty cycle of the grating structures optimised for wavelengths around 500 nm were calculated using rigorous diffraction theory. We used electron-beam lithography for the manufacturing of linear and crossed grating patterns with pitches of 200 nm and various duty cycle...
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This research focuses on the manufacturing of 1 by 4 multimode polymer splitter. MEMS fabricating process was first adopted for the fabrication of four inches silicon mold insert and then the micro hot embossing technique was applied to the optical class PMMA material for splitters. The BeamPROPTM simulation software was utilized for the design of optimal silicon mold insert. In the analysis of...
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متن کاملUltrasonic Hot Embossing
Ultrasonic hot embossing is a new process for fast and low-cost production of micro systems from polymer. Investment costs are on the order of 20.000 € and cycle times are a few seconds. Microstructures are fabricated on polymer foils and can be combined to three-dimensional systems by ultrasonic welding.
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ژورنال
عنوان ژورنال: Micromachines
سال: 2017
ISSN: 2072-666X
DOI: 10.3390/mi8010029